Abstract
The thickness of a bending thin film was determined by the comparison of the observed contrast of zone axis patterns with the calculated contrast based on a dynamical electron diffraction theory. This method allows us to measure the film thickness nondestructively at the symmetry Bragg reflection position where crystal lattice images appear clearly. Therefore, it seems to be a useful technique for high resolution electron microscopy. The estimation of the film thickness can be easily performed if the contrast of the patterns has been calculated once as a function of thickness
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