Abstract
A kind of ionization gas sensor based on the polarization structure was designed and manufactured by MEMS technology. The gas sensor device consists of 3 main parts: the anode electrode, the cathode and the distributed polarization structure array which lie between the former two parts. All parts were coated with ZnO nanorods by a two-step hydrothermal method. Different concentration acetone gas was tested using the device. The results support that the ionization gas sensors exhibit reasonable sensitivity and good repeatability at the applied voltages lower than 4V.
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