Abstract
This paper reports a MEMS based electrochemical seismometer featured with low cost and wide working bandwidth. In this study, a new sensing unit was proposed, in which a pair of ultra-thin electrodes with large reactive surface areas were integrated on corresponding silicon substrates, leading to 1) an decrease in cost and an increase in yield due to the simplified fabrication processes (e.g., only three standard microfabrication steps); and 2) an increase in the working bandwidth (0.14Hz -26.81Hz) based on the optimized geometrical parameters, compared to conventional electrochemical seismometers (0.47Hz -18.24Hz).
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
