A MEMS Accelerometer Based on Wavelength Modulation Using an Integrated Blazed Grating

Abstract

This paper reports a microelectromechanical systems (MEMS) optical fiber accelerometer with an integrated blazed grating as a wavelength modulation component. The accelerometer includes a V-shaped cantilever beam, a vertically symmetrical proof mass, and an integrated blazed grating. The accelerometer prototype is fabricated with bulk micromachining processes and is tested. The bandwidth of the accelerometer is 200 Hz. The optical sensitivity and nonlinearity of the measure range ±5.2 g are 1.63 nm/g at 100 Hz and 0.06%, respectively. The x- and y-axes cross-axis sensitivities are 2% and 4.5%, respectively. In the full temperature range of -20 °C-200 °C, the temperature sensitivity is 2.8 pm/°C. Thanks to the above-mentioned characteristics, the proposed MEMS accelerometer could have a wide range of applications, such as rail traffic and attitude heading sensing applications.