Abstract
With the development of intelligent machine tools, monitoring the vibration by the accelerometer is an important issue. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high resolution, and high bandwidth. A commonly used accelerometer is the lead zirconate titanate (PZT) type; however, integrating it into intelligent modules is excessively expensive and difficult. Therefore, the micro electro mechanical systems (MEMS) accelerometer is an alternative with the advantages of lower price and superior integration. In the present study, we integrated two MEMS accelerometer chips into a low-pass filter and housing to develop a low-cost dual-axis accelerometer with a bandwidth of 5 kHz and a full scale range of ±50 g for measuring machine tool vibration. In addition, a platform for measuring the linearity, cross-axis sensitivity and frequency response of the MEMS accelerometer by using the back-to-back calibration method was also developed. Finally, cutting experiments with steady and chatter cutting were performed to verify the results of comparing the MEMS accelerometer with the PZT accelerometer in the time and frequency domains. The results demonstrated that the dual-axis MEMS accelerometer is suitable for monitoring the vibration of machine tools at low cost.
Highlights
With the trend of industry 4.0 and intelligent production, many experts have devoted efforts to incorporate intelligent technology into machine tools [1,2,3,4,5,6,7,8]
A milling experiment was performed to verify accelerometer, we designed the package of the mechanical systems (MEMS) accelerometer and analyzed the heat and the results of comparing the MEMS accelerometer with the PZT accelerometer in the time and resonance frequency
The results model analysis revealed the minimum natural frequency was approximately to perform the finite element method (FEM) analysis and determine the natural mode shapes and
Summary
With the trend of industry 4.0 and intelligent production, many experts have devoted efforts to incorporate intelligent technology into machine tools [1,2,3,4,5,6,7,8]. MEMS accelerometer (Analog Devices, Inc., Norwood, MA, USA) was used This accelerometer has a bandwidth of 22 kHz, a full-scale range of g, and a sensitivity of 24.2 mV/g, thereby providing a fully differential sensor structure and circuit path for excellent resistance to electromagnetic interference (EMI) and radio frequency interference (RFI). Developed a platform for evaluating the sensitivity of the MEMS chip form a uniaxialwe accelerometer, we combined two accelerometers and designed a filter circuit accelerometer basedand onathe back‐to‐back calibration method [17,18].InAfter testing the with housing fixedISO‐16063‐21 magnetic structure to satisfy the measurement requirements. A milling experiment was performed to verify accelerometer, we designed the package of the MEMS accelerometer and analyzed the heat and the results of comparing the MEMS accelerometer with the PZT accelerometer in the time and resonance frequency. MEMS accelerometer with the PZT accelerometer in the time and frequency domains
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