Abstract
Coriolis vibratory gyroscopes (CVGs) with circular micro-resonators, such as hemispherical, ring, and disk resonators, exhibit excellent performances and have extraordinary potential. This paper discusses a generalized lumped mass model for both 3D and planar circular micro-resonators, establishing the relationship between the modal effective mass, the modal equivalent force, and the point displacement of the resonator. The point displacement description of a continuous circular resonator’s motion is defined from the view of capacitance measurement. The modal effective mass is, consequently, determined by the kinetic and the potential energy of the structure and is computed with numerical simulations. Moreover, the modal equivalent force, which can be theoretically calculated for any configuration of discrete electrodes, is deduced by using the concept of force density and the force distribution function. By utilizing the lumped mass model in this paper, the stiffness softening, the mode tuning, and the quadrature correction of the micro-resonators are investigated in detail. The theoretical model is verified by both the finite element method (FEM) and the experiments.
Highlights
MEMS Coriolis vibratory gyroscopes (CVGs) with circular micro-resonators, such as ring [1,2,3,4], disk [5,6], hemispherical [7,8], birdbath shell [9,10], and wineglass [11], exhibit extraordinary performances by their structural symmetry and, have drawn tremendous interest in both the academic and the industrial fields
This paper presents a general lumped mass model which discusses the modal effective mass and the modal equivalent force from the perspective of the point displacement description, clarifying the definitions of the point displacement and the modal effective mass, and examining the modal equivalent force with the concept of electrostatic force density in conjunction with force distribution functions
This paper demonstrated a general lumped mass model for both 3D and planar circular micro-resonators in CVGs, associating the modal effective mass and the modal equivalent force with the point displacement of the continuous circular structure
Summary
MEMS Coriolis vibratory gyroscopes (CVGs) with circular micro-resonators, such as ring [1,2,3,4], disk [5,6], hemispherical [7,8], birdbath shell [9,10], and wineglass [11], exhibit extraordinary performances by their structural symmetry and, have drawn tremendous interest in both the academic and the industrial fields. The fabrication process of planar micro-resonators is compatible with the widely served MEMS technology [22,23,24] Researchers in this field aim their attention at optimizing structure designs to boost the Q factor of micro-resonators and to increase the mechanical sensitivity of CVGs [25,26]. The motivation of this paper is to establish the relationships between the displacements, the effective mass, and the electrostatic force and to quantitatively, readily investigate the effects of the stiffness softening and the electrostatic tuning of both 3D and planar micro-resonators, providing an efficient way to analyze the features of the mode matching and the quadrature correction.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
