Abstract
This paper presents new results on the performance of a special cold-cathode gauge. The use of an AC and DC voltage simultaneously as the power source makes it possible to ignite and sustain a discharge at a significantly lower voltage than normal over a wide pressure range (from 5 to 3×10 −6 Pa). The Penning discharge voltage can be as low as 20 V at a pressure of 0.3 Pa and 300 V in high vacuum. For low values of pressure, the discharge current has a monotonously increasing dependence on the gas pressure. If a low RF voltage is applied to a high-voltage DC discharge, the discharge current increases in many times. These discharge properties can be used to improve the performance of devices that use the Penning and other magnetic discharges (total and partial pressure gauges, leak detectors, ion pumps, ion sources and hot plasma sources). A vacuum gauge of this type combines the best features of magnetic discharge and hot cathode ionization gauges.
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