Abstract
The advantages of a room-temperature field emission (FE) cathode for forming a sub-micrometer high current, low voltage electron probe, namely small energy spread, high brightness and a small virtual source diameter are somewhat offset by the high vacuum required in the electron gun and the fluctuations in the emission current. The thermal-field mode of operation, with its relaxed vacuum requirements and relatively stable emission current has the disadvantage of an increased energy spread of emission, which degrades the spatial resolution of a focused beam. A Schottky point emitter, similar in geometry to a field emitter but with a larger radius, can achieve high current density by use of a low work function surface operating at elevated temperature. In the Schottky emission (SE) mode, electron transmission over the top of the potential barrier rather than tunneling through the barrier is the emission mechanism.
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