Abstract
We have developed an ionization gauge with a carbon nanotube (CNT) cold cathode for low-vacuum applications. The gauge features a small grid-collector gap for low sensitivity factor and a HfC-coated CNT field-emission cathode. The vacuum is indicated by the ratio of the ion current to the electron-emission current, and good linearity is obtained in He, Ar, N2, and air throughout the vacuum range from 10−7to1Torr. A 20nm layer of polycrystalline HfC sputtered on CNT cathode improves the emission stability and the lifetime in low vacuum.
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