Abstract
All YBa 2Cu 3O 7− x (YBCO) DC-superconducting quantum interference devices (SQUIDs) have been prepared using edge junctions between c-axis oriented YBCO films. The edge junctions were prepared with a natural barrier. The junctions were fabricated by an epitaxial multilayer sputtering process with patterning steps in between. The two superconducting layers were separated by an insulating epitaxial NdAlO 3 layer apart from the junction areas. The maximum flux-to-voltage conversion d V/dΦ was 30 μV/Φ 0 at 77 K with a regular modulation over many flux quanta Φ 0. The equilivalent flux noise measured in the flux locked loop mode was 4.5 × 10 −5Φ 0/ Hz 1 2 at 2 Hz and 1.5 × 10 −5Φ 0/ Hz 1 2 above 40 Hz in the white noise region measured at 60 K. These results correspond to an energy resolution of 2 × 10 −28 J/Hz at 2 Hz and ϵ n,w ( f>40 Hz) = 2 × 10 −29 J/Hz at 60 K.
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