A Low-Noise 150–210 GHz Detector in 45 nm CMOS SOI

Abstract

This letter presents a G-band detector in a 45 nm silicon-on-insulator CMOS technology. The measured detector responsivity is 3 kV/W at 170-180 GHz with a 3 dB bandwidth of 150-210 GHz. The detector results in a Noise-Equivalent-Power (NEP) of 8-10 pW/Hz1/2 at a bias current of 50-200 μA for an IF of 10 MHz and is well matched with an input return loss > 10 dB at 167-194 GHz. The responsivity and NEP values are close to the best SiGe detectors, and show that advanced CMOS nodes are suitable for ~ 200 GHz imaging arrays.