Abstract
A low-cost thin-film microcircuit conductor/resistor technology is developed which offers reduced material costs, a simple fabrication process, relatively low resistor temperature coefficients, and low resistance conductor metalization. The process uses copper for the conductors and Kanthal for the resistors; the process is compatible with certain selective etches to realize a subtractive process.
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Schedule a callMore From: IEEE Transactions on Components, Hybrids, and Manufacturing Technology
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