Abstract
This paper presents an optimal design for a Love wave reflective delay line on 41° YX LiNbO3 with a polymer guiding layer for wireless sensor applications. A theoretical model was established to describe the Love wave propagation along the larger piezoelectric substrate with polymer waveguide, and the lossy mechanism from the viscoelastic waveguide was discussed, which results in the optimal guiding layer thickness. Coupling of modes (COM) was used to determine the optimal design parameters of the reflective delay line structured by single phase unidirectional transducers (SPUDTs) and shorted grating reflectors. Using the network analyzer, the fabricated Love wave reflective delay line was characterized, high signal noise ratio (S/N), sharp reflection peaks, and few spurious noise between the peaks were found, and the measured result agrees well with the simulated one. Also, the optimal guiding layer thickness of 1.5∼1.8µm was extracted experimentally, and it is consistent with the theoretical analysis.
Highlights
Love devices are used widely for bio(chemical) sensor applications because these devices provide low acoustic loss in contact with liquid, high sensitivity, and good protection of the interdigitalSensors 2008, 8 transducers (IDTs) from harsh gas and liquid environments [1,2,3,4]
It was composed of interdigital transducers (IDTs) and several reflectors positioned on the piezoelectric substrate in a row
We propose a theoretical propagation solution for a Love wave in a multilayer structure composed of an anisotropic substrate with large piezoelectricity (example of 41o YX LiNbO3 with Eular angles of (0, -49, 0)), and a isotropic guiding layer using the method descrbed in [11]
Summary
Love devices are used widely for bio(chemical) sensor applications because these devices provide low acoustic loss in contact with liquid, high sensitivity, and good protection of the interdigitalSensors 2008, 8 transducers (IDTs) from harsh gas and liquid environments [1,2,3,4]. Love devices are used widely for bio(chemical) sensor applications because these devices provide low acoustic loss in contact with liquid, high sensitivity, and good protection of the interdigital. Due to the active oscillator structure, the Love wave sensor structured by delay line patterns cannot be used in wireless sensor applications for some toxic and dangerous environments because of the power system requirements. Use of a SAW reflective delay line pattern as the wireless gas sensor element with some meaningful results as high sensitivity, passive absolutely was reported [5]. It was composed of interdigital transducers (IDTs) and several reflectors positioned on the piezoelectric substrate in a row. When the IDTs of the SAW reflective delay line receive electromagnetic (EM)
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