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Abstract
We describe a laser-plasma soft-x-ray source based on a cryogenic-xenon liquid-jet target. The source is suitable for extreme ultraviolet (EUV) projection lithography and proximity x-ray lithography (PXL). Absolute calibrated spectra in the 1–2 nm range and uncalibrated spectra in the 9–15 nm range are obtained using a free-standing transmission grating and a CCD-detector.
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