Abstract
AbstractA surface acoustic wave (SAW) is perturbed due to physical and/or chemical changes in an adjacent medium. If a liquid‐phase sensor is to be realized, a shear horizontal SAW (SH‐SAW) must be used. SH‐SAW sensors have been investigated since 1987. Objects measured using an SH‐SAW sensor include not only immunoreactions but also liquid properties. The advantage of an SH‐SAW sensor is the simultaneous detection of the mechanical and electrical properties of liquids. In this paper, first, the theory behind the SH‐SAW sensor is described. Then experimental results using the SH‐SAW sensor on 36YX‐LiTaO3 are introduced. In addition, the sensor sensitivities of the SH‐SAW sensors that have been fabricated on piezoelectric substrates are theoretically compared. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(2): 41–49, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.10407
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