A Linear Ultrasonic Motor Using Bending Vibration Transducer with Double Driving Feet

Abstract

A linear ultrasonic motor using bending vibration transducer with double driving feet was proposed. The motor consists of two exponential shape horns located on the two leading ends. Two orthogonal bending vibrations are superimposed in the motor and generate elliptical trajectories at the driving feet. The motion trajectories of the driving feet were deduced. Transient analysis was developed to gain the vibration characteristics of motor. A prototype motor was fabricated and measured. Typical output of the prototype is no-load speed of 990 mm/s and maximum thrust force of 12 N at a voltage of 150 Vrms.