Abstract
This study uses the structure of a MEMS gas sensor to fabricate a La2O3-NPs/ZnO/MEMS SO2 gas sensor. La2O3 nanoparticles (La2O3-NPs) with an average diameter of about 20 nm are produced by ultrasonic wave grinding. For SO2 gas, the La2O3-NPs/ZnO/MEMS gas sensor has a greater sensor response to 400 ppb SO2 gas at an operating temperature of 342 °C than a ZnO/MEMS gas sensor or a La2O3-NPs/MEMS gas sensor. This result demonstrates that the large 44% sensor response is due to the ZnO thin film with La2O3 nanoparticles. The experimental results also show that the ZnO thin film acts as an electronic transmission path. The sensors exhibit a higher sensitivity to SO2 than other gases (NO2, CO, CO2) at the optimal operating temperature of 342 °C. The reproducibility experiment shows that the La2O3-NPs/ZnO/MEMS SO2 gas sensor is stable.
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