Abstract
In this paper, we propose a job-family-oriented algorithm to address the scheduling problem for re-entrant batch processing machine (RBPM) with incompatible job families and dynamic arrivals in the semiconductor wafer fabrication system (SWFS). In SWFS, at each time a RBPM is idle and available, the general algorithm first forms batches, then sequences these batches and finally assigns the super-batch to the idle RBPM. However, the job-family-oriented algorithm directly sequences the job families and assigns the jobs of super-family to the idle RBPM. With the rolling horizon control strategy, the job-family-oriented algorithm can update solution continually. Through comparing the two algorithms with some commonly used optimality criteria, the results demonstrate the effectiveness of our proposed algorithm.
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