Abstract

Semiconductor wafer fabrication system (SWFS) is the most complex and capital-intensive phase in the entire semiconductor manufacturing cycle. With characteristics of re-entrant processing routes, equipment uncertainty, product diversity and improving technologies, great challenges are presented in SWFS’s modeling, scheduling and simulation. To implement efficient production control, this paper provides a timed extended object-oriented Petri nets (TEOPNs) approach to performance modeling, real-timed dispatching and simulation of SWFSs. The TEOPNs models are constructed in a hierarchy to accord with the real-world SWFS’s organization, and a new type of signal place is added into the TEOPNs to respond the dynamic states of all processing facilities. A novel autonomy and coordination-based real-time dispatching mechanism (A&C-RDM) is developed in this paper, which executes under the support of the TEOPNs-based hybrid real-time dispatching control system (HRDCS). Owning to the ability of gathering dynamic real-time information of all production facilities and WIP products, the HRDCS can make adaptive dispatching decisions according to the local and global real-time processing status. Two sets of key elements of real-time dispatching, i.e. the state thresholds and dispatching rules, are defined in the HRDCS so that the A&C-RDM can integrate different types of dispatching rules. A set of simulation experiments prove the efficiency of the proposed modeling and dispatching algorithm. In summary, the proposed TEOPNs, HRDCS and A&C-RDM form the cornerstones of a real-time dispatching simulation prototype of SWFS, and the work described in this paper carries out an advanced integrated “modeling–dispatching–simulation” methodology.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call