Abstract
The development of a highly sensitive (sub-nanometer) and multi-platform scanning probe microscope (SPM) module is presented. The module is based on an optical DVD pick-up head and uses its astigmatic detection scheme to detect the vertical displacement of the SPM cantilevers. The complete hybrid SPM module is capable of scanning in SPM intermittent contact, SPM contact and optical profilometry modes. The module can be used in a modified optical microscope or be implemented in a stand-alone system. Measurement results prove that the mechanical stability of this SPM module is high enough for atomic resolution imaging. Both scanning-sample and scanning-probe-type SPM setups have been tested based on this SPM module. The noise level and drift rate in the z-direction of the stand-alone system are 10 pm (rms) and 0.2 nm min−1, respectively.
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