Abstract
Integrated devices incorporating MEMS (microelectromechanical systems) with IC (integrated circuit) components have been becoming increasingly important in the era of IoT (Internet of Things). In this study, a hybrid fuzzy MCDM (multi-criteria decision making) model was proposed to effectively evaluate alternative technologies that incorporate MEMS with IC components. This model, composed of the fuzzy AHP (analytic hierarchy process) and fuzzy VIKOR (VIseKriterijumska Optimizacija I Kompromisno Resenje) methods, solves the decision problem of how best to rank MEMS and IC integration technologies in a fuzzy environment. The six important criteria and the major five alternative technologies associated with our research themes were explored through literature review and expert investigations. The priority weights of criteria were derived using fuzzy AHP. After that, fuzzy VIKOR was deployed to rank alternatives. The empirical results show that development schedule and manufacturing capability are the two most important criteria and 3D (three-dimensional) SiP (system-in-package) and monolithic SoC (system-on-chip) are the top two favored technologies. The proposed fuzzy decision model could serve as a reference for the future strategic evaluation and selection of MEMS and IC integration technologies.
Highlights
IntroductionPublisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations
It is a remarkable fact that MEMS transducers are the key enablers of IoT [2], because IoT requires a variety of input quantities that are sensed from external environments
The global semiconductor industry expects a higher integration of mechanical structures with electronics that can be manufactured by CMOS technologies as usual
Summary
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. The rapid development of IoT (Internet of Things) provides great opportunities for disruptive innovations [1]. It is a remarkable fact that MEMS (microelectromechanical systems) transducers are the key enablers of IoT [2], because IoT requires a variety of input quantities that are sensed from external environments. MEMS devices act as transducers that measure or control physical, optical, or chemical quantities, such as acceleration, radiation, or fluids [3]. A typical configuration of an accelerometer sensor system in an airbag system is shown in Figure 1 [4]. The MEMS device interacts with the signal conditioning ICs to produce the amplified signal that fires the ignitor if the deceleration is high enough
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