Abstract
A novel hybrid electromagnetic-piezoelectric actuated tri-axial fast tool servo (FTS) with the hybrid serial-parallel structure is presented to satisfy the requirements of the large-stroke planar motion and the high-bandwidth vertical motion for the ultraprecision diamond turning of the complicated optical surfaces. To further improve the high-frequency spatial vibration capability, a compact three-dimensional elliptical vibration generator (3D EVG) actuated by four parallel-arranged piezoelectric actuators (PEAs) is integrated into the tri-axial FTS. The structural parameters of the proposed tri-axial FTS system are optimally designed by modeling its mechanical and electromagnetic components, and the measured mechanical performance of the resulting prototype exhibits a good agreement with the designed objective. Finally, hierarchical micro/nano-structured surfaces are fabricated by using the developed tri-axial FTS to demonstrate its comprehensively machining capacity.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
