Abstract
Conventionally, piezoelectric ultrasonic linear actuators operate in longitudinal and bending combination (degenerate) modes for producing an elliptic motion which drives a slider moving linearly. With the increasing temperature, the degenerate mode will split into two separated modes again, resulting in piezoelectric actuators working to fail. Here, we report a miniature piezoelectric ultrasonic linear actuator made of Mn modified (1−x)BiScO3–xPbTiO3 piezoelectric ceramics operating in two orthogonal first bending modes (B1-B1). The B1-B1 mode linear actuator showed much better load and speed temperature stability than piezoelectric actuators operating in different combination mode in the investigated temperature range of room temperature to 200 °C.
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