Abstract
Fringe projection profilometry (FPP) has been one of the most popular non-contact methods for 3D surface measurement in recent years. In FPP, the quality of the fringe pattern determines the measurement accuracy and measurement range to a great extent. In this paper, we proposed a high-quality fringe projection method using a biaxial MEMS scanning mirror and a laser diode (LD). The fringe pattern is produced by a very low NA (numerical aperture) scanning laser beam. Compared with pixel array based fringe pattern generation method, such as DLP and LCOS, the generation method can produce higher performance fringe pattern, which is high contrast, narrow pitch and long depth. In this paper, we also did a contrast between different fringe pattern generation methods.
Published Version
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