Abstract
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.
Highlights
The precise measurement of pressure in high-temperature environments is critical in many applications such as in the automotive industry, aerospace, aeronautics, advanced industry, aero-engine turbines, and the civil industry [1,2,3,4]
In order to solve the problem wherein wireless passive pressure sensors capture pressure signals with difficulty in high-temperature environments, the authors have proposed a sensor based on an alumina ceramic
Alumina is a critical high-temperature ceramic material used for the fabrication of sensors applied in high-temperature environments
Summary
The precise measurement of pressure in high-temperature environments is critical in many applications such as in the automotive industry, aerospace, aeronautics, advanced industry, aero-engine turbines, and the civil industry [1,2,3,4]. LTCC-based capacitance pressure sensor and a High-Temperature Co-Fired Ceramic (HTCC)-based capacitance pressure sensor. The performance of these sensors is better than that of the aforementioned sensors, but, they can’t be operated above 600 °C [13,14]. Tan et al fabricated a pressure sensor using HTCC MEMS technology for use in harsh environments This sensor can operate in high-temperature environments, but the coupling distance is only 2.8 cm at room temperature and the coupling strength will weaken quickly as the temperature increase [15]. In order to solve the problem wherein wireless passive pressure sensors capture pressure signals with difficulty in high-temperature environments, the authors have proposed a sensor based on an alumina ceramic. The achieved sensor was tested to realize pressure testing between atmospheric pressure and 5 bar in a high-temperature pressure test setup in the range from room temperature to 600 °C to demonstrate the pressure sensing capabilities of the sensor in high-temperature environments
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