Abstract
Fourier ptychographic microscopy (FPM) is a computational imaging technology that can acquire high-resolution large-area images for applications ranging from biology to microelectronics. In this study, we utilize multifocal plane imaging to enhance the existing FPM technology. Using an RGB light emitting diode (LED) array to illuminate the sample, raw images are captured using a color camera. Then, exploiting the basic optical principle of wavelength-dependent focal length variation, three focal plane images are extracted from the raw image through simple R, G, and B channel separation. Herein, a single aspherical lens with a numerical aperture (NA) of 0.15 was used as the objective lens, and the illumination NA used for FPM image reconstruction was 0.08. Therefore, simultaneous multifocal plane FPM with a synthetic NA of 0.23 was achieved. The multifocal imaging performance of the enhanced FPM system was then evaluated by inspecting a transparent organic light-emitting diode (OLED) sample. The FPM system was able to simultaneously inspect the individual OLED pixels as well as the surface of the encapsulating glass substrate by separating R, G, and B channel images from the raw image, which was taken in one shot.
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