Abstract
We report on a novel Palladium (Pd)-based MEMS capacitive hydrogen gas sensor which has an inverted T-shaped electrode and a ring-shaped palladium layer that enable high sensitivity. Thanks to these structures, deformation of the membrane caused by hydrogen absorption can be efficiently transduced to the capacitance change. The capacitance change was found to be 3 times larger than that of the conventional structure. The prototype sensors were fabricated by a CMOS compatible process. The sensor operation was confirmed up to the lower explosive limit of 4%vol. hydrogen. We also show that the proposed sensor has a broad design window that attains high sensitivity.
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