Abstract
We present a modular extreme ultraviolet (XUV) spectrometer system optimized for a broad spectral range of 12-41 nm (30-99 eV) with a high spectral resolution of λ/Δλ ≳ 784 ± 89. The spectrometer system has several operation modes for (1) XUV beam inspection, (2) angular spectral analysis, and (3) imaging spectroscopy. These options allow for a versatile use in high harmonic spectroscopy and XUV beam analysis. The high performance of the spectrometer is demonstrated using a novel cross-sectional imaging method called XUV coherence tomography.
Highlights
The advent of extreme ultraviolet (XUV) sources such as free-electron lasers (FLASH1 FERMI2) or laser-driven high harmonic (HHG) sources3–5 has opened new applications and opportunities in basic research and applied science
We presented a high-resolution high-efficiency XUV spectrometer that is optimized for the characterization of HHG beams and the cross-sectional imaging technique XUV Coherence Tomography (XCT)
Due to the high performance over a large spectral range in the XUV spectral range, the spectrometer is highly suited for high harmonic spectroscopy and spectral interferometry in the XUV spectral range
Summary
The advent of extreme ultraviolet (XUV) sources such as free-electron lasers (FLASH1 FERMI2) or laser-driven high harmonic (HHG) sources has opened new applications and opportunities in basic research and applied science. In most of the scientific applications, XUV spectrometers with high detection efficiency and resolution are required. The instrument described here has been developed for XUV Coherence Tomography (XCT), a method which has been introduced recently for non-invasive cross-sectional imaging of nanostructures.. For frequency-domain XCT, the efficiency of the spectrometer is essential because of the small scattering cross sections in the XUV while the resolution directly corresponds to the maximum depth at which structures can be detected beneath the sample’s surface.. The instrument can measure the divergence of the XUV beam and the angularly resolved spectra. This is useful for, e.g., optimization of HHG. We discuss the requirements for the XUV spectrometer, its technical design, the improved XCT measurements, and the resulting spectrometer resolution
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