A High‐Performance Flexible Triboelectric Nanogenerator Based on Double‐Sided Patterned TiN/PDMS Composite Film for Human Energy Harvesting

Abstract

The flexible triboelectric nanogenerator (TENG) has promising applications in portable electronic devices and micro wireless sensors. However, complex fabrication processes, high cost, and difficulty in coupling with the human body are still the challenges for the further development of TENG. Herein, a flexible double‐sided patterned titanium nitride/polydimethylsiloxane (DSP‐TiN/PDMS) composite film is prepared by a simple and low‐cost sandpaper template method. The double‐sided microporous structure on the PDMS increases the effective contact area and promotes more charge storage on the PDMS surface, thus improving the output performance of TENG. With the introduction of conductive TiN nanoparticles, the effective thickness of the composite film can be reduced, leading to the increase of the capacitance value of TENG. Therefore, the TENG fabricated under the conditions of optimized filling content and surface patterning microstructure can generate a high open‐circuit voltage of 51.8 V and a short‐circuit current of 36.8 μA, as well as a peak power of 11.25 μW. Furthermore, the proposed TENG can also achieve effective energy harvesting in human motions. This easy‐to‐prepare DSP‐TiN/PDMS composite film opens up a feasible way for the construction of high output performance TENG and presents promising applications in micro wearable devices.