Abstract
A high frequency ion source with radial excitation field is described and compared with a usual axial excitation type. In the former type, the plasma is localized near excitation electrodes. The energy of emitted ions is considerably lower than an applied probe potential. Ionizing electrons were not lost by random scattering at the protruding parts of discharge vessel as in the case of the axial excitation type because these were not included in the ionization region in the radial excitation type. The operation is more stable and the startup is easier than in an ordinary axial excitation type.
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