A Height Measurement Based on Laser Triangulation Probe and a Two Dimensional Image Measurement System for Smart Manufacturing

Abstract

This paper integrated a laser triangulation probe with a two-dimensional image measurement system to measure the height of an object using the auto-focusing method. In the laser triangulation probe, the laser diode was used as the light source and one-dimensional position sensitive detector was adopted to receive the position of the laser spots to detect the height. The laser triangulation probe was used for small height measurement and the auto-focusing method was used for large height measurement. Two standard gauges with thicknesses of 8mm and 8.5mm were used to verify our proposed method. With height difference of 500μm, the experiment results showed the measuring error was within ±3μm and standard deviation was about 0.1μm.