Abstract
AbstractA laboratory course experiment is described that combines traditional semiconductor fabrication techniques with the application of a nanotechnology‐relevant material, graphene. Sensor devices made with graphene are integrated with a microfluidic device in order to introduce students to new applications of this technology in biology and medicine. The fabrication and test process for a pH sensor is used as a tangible example, exhibiting a changing resistance across graphene strips immersed in different pH buffer solutions. The processing and test equipment required is available in many Si device fabrication educational laboratories.
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