Abstract

A quantification tool for energy-dispersive X-ray fluorescence (ED-XRF) spectral data is presented, based on the application of Monte Carlo simulations in an iterative, inverse manner. Acting as an open-source plug-in to the widespread PyMca package, it provides users with a superior alternative to the fundamental parameter method based built-in quantification tool, taking into account higher order interactions, M-lines and cascade effects. Examples are shown demonstrating the usefulness of our implementation through data recorded at the synchrotron X-ray fluorescence microprobe installed at the HASYLAB Beamline L, Hamburg, Germany.

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