Abstract
A general Monte Carlo code for the simulation of energy dispersive X-ray fluorescence (ED-XRF) spectrometers is presented. As a significant extension to existing Monte Carlo codes, dedicated to ED-XRF spectrometers, the new code includes several unique features such as the simulation of M-lines and cascade effects. The detector response function was extended with fluorescence and Compton escape peaks, as well as with pulse pile-up. A full description of the underlying algorithms is given. The software was validated by means of comparison with experimental spectra of standard reference materials collected at the synchrotron XRF-microprobe installed at HASYLAB Beamline L, Hamburg, Germany.
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