Abstract
A gas flow standard apparatus is introduced. It is a kind of calibration apparatus of gas throughput and can be used to calibrate a gas flowmeter and reference leak. It consists of the following main parts: a constant pressure flowmeter, a calibration system, a flow inlet system and a measurement and control system. Hydraulically driven bellows are used for the variable chamber of the constant pressure flowmeter. A constant torque servo motor drives a guide system to realize the horizontal motion of the piston. A precision grating ruler is used to measure the piston displacement. The measurement and control system maintains the pressure difference between variable chamber and reference chamber at less than 0.01% of the reference chamber pressure. The gas flow standard apparatus can calibrate the throughput with the direct method of measurement and the comparison method of measurement. Its calibration range is 1 × 10 −5−23 PaL/s with the uncertainty at less than 2%.
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