A Fully Integrated Solid-State Charge Detector with through Fused Silica Glass via Process

Abstract

A charge detector is a vital component in neutrino and dark matter detection. The integration of a charge collector in the form of flat pads and readout modules has been proposed as an optimization method as it can reduce noise and installation complexity. As a substrate, fused silica glass has attracted considerable attention due to its low radioactive background properties. In this research, based on the application requirements of a high charge collection rate and low noise, the structure of the charge detector was designed using calculation and simulation methods. The entire manufacturing process is described. In addition, a novel through glass via (TGV) structure composed of a conformal metal layer and a photosensitive material that is easy to fabricate and has high morphological compatibility with via filling is proposed. The curing property of the new material was characterized. A fully integrated solid-state charge detector with 32 groups of TGVs was realized. Additionally, the electrical properties of key structures were tested and analyzed.