Abstract
We propose a novel fabrication process to make flexible microneedle electrode array. The process includes creation of a silicon microneedle electrode array using a silicon-on-insulator substrate followed by its release using parylene films as the support material. The proposed structure provides flexibility of a parylene thin film and rigidity of a silicon structure. Using tissue-penetration tests and impedance spectroscopy, we demonstrate that such a structure is promising in invasive neural electrical stimulation and recording.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
