Abstract
The hydrogen-sensing property of new type field-effect gas sensor device was studied. The device had an FET structure based on porous silicon. Adsorption of molecules into the porous silicon strongly changes the electrical properties of the transistor structure. Interestingly, the current variation induced by Hydrogen gas vapour that is the sensitivity of the sensor can be electrically tuned by changing polarization voltage. It has been shown that the device exhibited excellent hydrogen-sensing characteristic at room temperature. The results show that current-voltage characteristics are modified by the gas reactivity on the PS surface. In conclusion, the FET gas sensor based on porous silicon shows a rapid response to low concentration of the hydrogen gas at room temperature.
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