Abstract
A compact equivalent circuit model, or macromodel, is presented which reproduces both the DC charge storage and transient switching current responses of a ferroelectric capacitor. The macromodel circuit element values are rigorously linked to physical quantities which are readily characterized with simple electrical measurements. A software package is described which both parameterizes and optimizes the model to measured data and outputs a SPICE input file. Together, the macromodel and parameterization software form a complete linkage between material characterization and circuit design which is largely transparent to the design engineer. Optimization results lend insight into the underlying theory of ferroelectric switching and the sources of nonideal charge storage. SPICE simulations demonstrate the utility of the macromodel for VLSI circuit simulation.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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