A dual-functional micro-focus X-ray source based on carbon nanotube field emission

Abstract

A micro-focus X-ray source with miniature pressure sensor was developed based on the multi-walled carbon nanotube (MWNT) field emission. The field emitters for both X-ray cathode and the pressure sensor were synthesized by direct chemical vapor deposition growth of MWNTs on catalytic substrates. MWNTs exhibited excellent field emission properties with the threshold field at 10 mA/cm2 of 2.30 V/μm, and the high current density of 10 A/cm2 could be reached at the field of 4.36 V/μm. The field emission electron gun was constructed with the aid of electrostatic simulations on the electron beam trajectories and the focal spot size (FSS) on the target with the demagnification factor of 5. The practical objects, including the semiconductor chip and the ceramic heating element, were tested by the X-ray source with the spatial resolution of less than 35 μm, and the fracture of the ceramic element inside metal case could be clearly detected. The pressure sensor monitored the in-situ pressures inside the source during the processing and after the sealing-off. The pressures in the sealed sources were generally in 10−4 Pa level and could rise to 10−2 Pa level during the operation.