Abstract
In quantitative XPS, the preparation of reference samples is difficult or impossible, and the correction factor method has been employed. Therefore, a convenient and practical procedure to get correction factors to estimate atomic ratios is proposed, in which it is assumed that the XPS intensity distribution corresponds to the distribution of the photoionization cross section. This procedure can be applied to some instruments and various samples without the previous collection, preparation of reference sample groups, and determination of sensitivity factors for each element.
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