Abstract

Ultrahigh frequency ultrasound (>60 MHz) has emerged as a crucial actuating mechanism for non-contact manipulation, owing to its unique acoustic field properties. The acoustic field traps microparticles mainly via the gradient force of acoustic radiation force (ARF) on the transverse plane, which is up to hundreds of nanonewtons. In theory, directly using ARF can strengthen the manipulation force. Currently, the direct implementation of ARF is restricted to a specific frequency and magnitude range, which lacks a comprehensive and versatile control method. Additionally, it lacks an ARF calibration method that accommodates a wide magnitude and frequency range. We propose a variable frequency pulse width modulation-based control method for ARF, which uses an atomic force microscope microcantilever as a mechanical sensor to calibrate the magnitude and frequency. The precise control of ARF emitted by an 85 MHz transducer was achieved with a resolution of hundreds of piconewtons, magnitude range spanning from nanonewtons to micronewtons, and frequency range of 1 kHz to hundreds of kilohertz. This control method breakthrough holds great promise for expanding the application of ultrahigh frequency ultrasound in noncontact manipulation.

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