A Comprehensive Benchmarking Method for the Net Combination of Mobility Enhancement and Density-of-States Bottleneck

Abstract

In this letter, we propose a comprehensive benchmarking method to simultaneously address mobility enhancement and density-of-states bottleneck in advanced field-effect-transistors (FETs) with novel high-mobility (high-μ) channel materials, where we focused on conventional covalent bonding semiconductors with pure and partially ionic character. This method relies only on the measured extrinsic transconductance of a long-channel FET in the saturation regime together with the source resistance, yielding the product of the effective mobility ( μ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> ) and effective gate capacitance ( C <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g_eff</sub> ). We tested this method in In <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1-x</sub> As quantum-well high-electron-mobility transistors (HEMTs) with various indium mole fractions, such as 0.53, 0.7, 0.8 and 1, as well as in Si n-FETs. We found that the In <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1-x</sub> As HEMTs with μ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> over 10,000 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> /V·s at 300 K provided more than 20 times greater μ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> ×C <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g_eff</sub> than Si n-FETs. More specifically, the product initially improved as x increased, then showed a peak value of 10,300 μF·V <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> ·s <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> at x of around 0.8, and degraded slightly beyond that composition. To verify the validness of the proposed method, we separately measured and analyzed C <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g_eff</sub> and μ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> using the split-CV technique, showing excellent agreement with the ones from the proposed method.