Abstract
Abstract The technique of reflection electron microscopy (REM) has been combined with wedge transmission electron microscopy (WTEM) in a single instrument using a single wedge-shaped specimen. This combination needs only a commercial transmission electron microscope (CTEM) with a double tilt (or less preferably a single tilt) specimen stage which allows a minimum 25° rotation about one principal axis. Additional specimen preparation for WTEM and instrumental modifications to a CTEM are not required. We have demonstrated that, using a single wedge-shaped GaAs/AlxGa1-x, As specimen, much useful information can be obtained by combining the complementary information provided by REM and WTEM.
Published Version
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