A combined ion probe/spark source analysis system

Abstract

Spark source mass spectrometry and secondary ion mass spectrometry have complementary advantages in the elemental analysis of solids. The AEI IM20 ion probe and MS702R mass spectrometer form a composite instrument incorporating both techniques; the design and different operating modes are described. A primary ion beam diameter as low as 2 μm can be obtained under favourable circumstances; the minimum detectable concentration of a typical element is derived as a function of this diameter. The mass resolution is greater than 5000 (10% valley definition) with electrical detection and 10,000 (50% density definition) with photographic detection; this resolution is much higher than that obtained with other secondary ion mass spectrometers. Two typical applications illustrate that such high mass resolution is a necessary prerequisite to quantitative interpretation in secondary ion mass spectrometry: precise isotopic analysis of titanium is demonstrated and the concentrations of impurity transition elements derived from ion probe and spark source analyses of a geological olivine are compared.