A CMOS Electrochemical Biochip With 32$\times$ 32 Three-Electrode Voltammetry Pixels

Abstract

A CMOS-integrated electrochemical biochip for high-performance molecular testing is presented. The system includes an array of 32 $\times $ 32 three-electrode voltammetry pixels and on-chip temperature control between 25 and 95 °C. Each 100 $\mu \text{m}\,\times 100\,\,\mu \text{m}$ pixel includes a CMOS-compatible and chemo-stable amorphous carbon electrode transducer connected to in-pixel $\Sigma \Delta $ current detection circuitry with 280 fA rms input-referred noise (0.1–20 Hz bandwidth) and 93 dB dynamic range (DR). Array-based DNA detection assays are implemented, and successful DNA melt-analysis and real-time label-free DNA hybridization detection are reported.