Abstract
In this paper, a novel photovoltaic-electrostatic hybrid actuator with a slant lower electrode based on the PLZT ceramic is proposed. The mathematical model of photovoltaic-electrostatic hybrid actuator is established. Then, based on the mathematical model of photovoltaic-electrostatic hybrid actuator and the parameters identified, the mathematical simulation of the closed-loop displacement control for the photovoltaic-electrostatic hybrid actuator based on the PLZT ceramic is carried out. The results show that the displacement of the actuator can be controlled successfully at a particular value within the pull-in displacement by the light source. Furthermore, the response speed of the output displacement for photovoltaic-electrostatic hybrid actuator with a slant lower electrode is faster than that with a parallel lower electrode, offering a good potential to advance the current applications on micro-electro-mechanical system.
Highlights
Photovoltaic-Electrostatic Hybrid ActuatorThey are connected through wires using the conductive silver paste
In this paper, a novel photovoltaic-electrostatic hybrid actuator with a slant lower electrode based on the PLZT ceramic is proposed
A novel photovoltaic-electrostatic hybrid actuator with a slant lower electrode based on the PLZT ceramic is proposed to improve the driving response of the photovoltaic-electrostatic hybrid actuator
Summary
They are connected through wires using the conductive silver paste. As the PLZT ceramic is illuminated by the UV light near 365 nm, the photovoltage in the polarization direction of PLZT ceramic generates and increases rapidly, and, when the UV light is turned off, the photovoltage decreases rapidly In this way, the photovoltage between the two electrodes of PLZT ceramic can be controlled in a timely manner by the controllable light source and Actuators 2021, 10, x FOR PEER REVIEW applied to the electrostatic actuator through wires to drive the electrostatic actuator. Electrode. (a) The structure parameters of the actuator. (b) Force condition of the actuator
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