Abstract
A low-noise instrumentation amplifier dedicated to a nano- and micro-electro-mechanical system (M&NEMS) microphone for the use in Internet of Things (IoT) applications is presented. The piezoresistive sensor and the electronic interface are respectively, silicon nanowires and an instrumentation amplifier. To design an instrumentation amplifier for IoT applications, different trade-offs are discussed like power consumption, gain, noise and sensitivity. Because the most critical noisy block is the amplifier, a delay-time chopper stabilization (CHS) technique is implemented around it to eliminate its offset and 1/f noise. The low-noise instrumentation amplifier is implemented in a 65-nm CMOS (Complementary metal–oxide–semiconductor) technology. The supply voltage is 2.5 V while the power consumption is 0.4 mW and the core area is 1 mm2. The circuit of the M&NEMS microphone and the amplifier was fabricated and measured. From measurement results over a signal bandwidth of 20 kHz, it achieves a signal-to-noise ratio (SNR) of 77 dB.
Highlights
The Internet of Things (IoT) is recognized by industry, and in particular the electronics industry, as one of the main engines of growth for the decade to come, if not more
mechanical systems (MEMS) sensors have been manufactured on a large scale for many consumer applications such as aerospace [1], inertial sensors in mobile phones such as gyrometers and accelerometers [2,3], video game controllers and airbag triggers
All current integrated circuits in the industry generally operate with supply voltages tothan an increase of the total power consumption that notM&NEMS
Summary
The Internet of Things (IoT) is recognized by industry, and in particular the electronics industry, as one of the main engines of growth for the decade to come, if not more. MEMS sensors have been manufactured on a large scale for many consumer applications such as aerospace [1], inertial sensors in mobile phones such as gyrometers and accelerometers [2,3], video game controllers and airbag triggers. These devices, which are the basis of. It is known thatTherefore, the reduction of dimensions mainly allows integrating it enables to reduce the manufacturing cost integrating more of devices on a given surface. The objective of thiswith paper is to implement a nano- amplifier, and micro-electro-mechanical system (M&NEMS).
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