A calibration method for fringe reflection technique based on the analytical phase–slope description

Abstract

The fringe reflection technique (FRT) has been one of the most popular methods to measure the shape of specular surface these years. The existing system calibration methods of FRT usually contain two parts, which are camera calibration and geometric calibration. In geometric calibration, the liquid crystal display (LCD) screen position calibration is one of the most difficult steps among all the calibration procedures, and its accuracy is affected by the factors such as the imaging aberration, the plane mirror flatness, and LCD screen pixel size accuracy. In this paper, based on the deduction of FRT analytical phase–slope description, we present a novel calibration method with no requirement to calibrate the position of LCD screen. On the other hand, the system can be arbitrarily arranged, and the imaging system can either be telecentric or non-telecentric. In our experiment of measuring the 5000mm radius sphere mirror, the proposed calibration method achieves 2.5 times smaller measurement error than the geometric calibration method. In the wafer surface measuring experiment, the measurement result with the proposed calibration method is closer to the interferometer result than the geometric calibration method.