A calculation of backscattering factor database for quantitative analysis by Auger electron spectroscopy

Abstract

A systematic calculation of the backscattering factor in quantitative analysis by Auger electron spectroscopy has been performed for the primary electron beam of energy from the threshold energy of inner-shell ionization to 30 keV at the incident angle of 0°–89° and for principal Auger transition and Auger electrons emitted from over 28 pure elements at an emission angle of 0°–89° by using a Monte Carlo simulation method. The calculation employs a general definition of backscattering factor, Casnati’s ionization cross section, up-to-date Monte Carlo model of electron scattering, and a large number of electron trajectories to ensure less statistical error. Both the configuration geometry of concentric hemispherical analyzer and the cylindrical mirror analyzer for Auger electron detection are considered in the calculation. The calculated backscattering factors are found to describe very well an experimental dependence of Auger electron intensity on primary energy and on incident angle for Si, Cu, Ag, and W in literature. The calculated numerical values of backscattering factor are stored in an open and online database at http://micro.ustc.edu.cn/BSFDataBase/BFAES.htm.